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Electrostatic tuning of double-layer photonic crystal nanocavities
Last modified: 2012-01-03
Abstract
We present the fabrication and characterization of tunable photonic crystal cavities on double semiconductor layers using an electrostatic nano electro mechanical system (NEMS). We demonstrate large (>10nm) tuning of cavity modes on InP. We also report about a novel device design based on vertically coupled one-dimensional (1D) photonic crystal nanobeams on GaAs.
Keywords
photonic crystals;