META 2021, META'12

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Au Nanofins and Double-nanopillars Fabricated by Nanocoating Lithography for Practical Plasmonic Sensor
Wakana Kubo, Takuo Tanaka

Last modified: 2011-12-06


Au nanofins and double nanopillars were fabricated successfully with a wafer-scale through the nanocoating lithography technique. Each structure has own structural feature and shows plasmon resonances depending on its size and shape, resulting in a plasmon sensor. Au double nanopillars showed a high refractive index sensitivity of 1075 nm/refractive index units.


Plasmonic sensor; gap structure; large-scale fabrication;