META 2021, META'12

Font Size: 
λ3/1000 Plasmonic Nanocavities for Biosensing Fabricated by Soft UV Nanoimprint and Degassing Assisted Patterning
Andrea Cattoni, Petru Ghenuche, Anne-Marie Haghiri-Gosnet, Dominique Decanini, Jean-Luc Pelouard Pelouard, Stéphane Collin

Last modified: 2011-12-06


In this work we present two Soft Lithography techniques for the nanoreplication at 20 nm scale on large surfaces:  Soft UV Nanoimprint Lithography (Soft UV NIL) and Degassing Assisted Patterning (DAP). To validate these ultra-high resolution techniques, we demonstrate the fabrication of 1D and 2D arrays of λ3/1000 plamonic nanocavities on a large surface up to 1 cm2. The fundamental mode of the cavity presents total omnidirectional absorption of light, while the second-order mode exhibits a sharper resonance. This high quality factor plasmonic resonance leads to high refractive index sensitivity and a high figure of merit, and can offer new perspectives for efficient biosensing experiments in ultra-low volumes.


Plasmonics; Soft Lithography; Biosensing