λ3/1000 Plasmonic Nanocavities for Biosensing Fabricated by Soft UV Nanoimprint and Degassing Assisted Patterning

Andrea Cattoni; Petru Ghenuche; Anne-Marie Haghiri-Gosnet; Dominique Decanini; Jean-Luc Pelouard Pelouard; Stéphane Collin

META 2021, META'12

Andrea Cattoni, Petru Ghenuche, Anne-Marie Haghiri-Gosnet, Dominique Decanini, Jean-Luc Pelouard Pelouard, Stéphane Collin

Last modified: 2011-12-06

Abstract

In this work we present two Soft Lithography techniques for the nanoreplication at 20 nm scale on large surfaces: Soft UV Nanoimprint Lithography (Soft UV NIL) and Degassing Assisted Patterning (DAP). To validate these ultra-high resolution techniques, we demonstrate the fabrication of 1D and 2D arrays of λ³/1000 plamonic nanocavities on a large surface up to 1 cm². The fundamental mode of the cavity presents total omnidirectional absorption of light, while the second-order mode exhibits a sharper resonance. This high quality factor plasmonic resonance leads to high refractive index sensitivity and a high figure of merit, and can offer new perspectives for efficient biosensing experiments in ultra-low volumes.

Keywords

Plasmonics; Soft Lithography; Biosensing