META 2021, META'12

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Effect of thermal annealing on propagation loss of plasmonic waveguide
Yiting Chen, Jing Wang, Min Yan, Min Qiu

Last modified: 2011-12-09


The propagation loss of a plasmonic stripe waveguide is measured before and after thermal annealing. It is found that the propagation loss of the waveguide at 980 nm is reduced by more than 50% (from ~0.52 dB/µm to ~0.2 dB/µm) after thermal annealing at 300 °C for 18 hours. The reduction in loss can be attributed to the improved gold surface condition and probably also to the change in the metal’s inner structure. 


Plasmonics; waveguide; SPP; propagation loss;